Glass Nanopillar Array Based Nanoplasmonic Lab-on-a-chip for Highly Sensitive Surface Enhanced Raman Spectroscopy

ABSTRACT This work presents the novel glass nanopillar array based nanoplasmonic lab-on-a-chip for highly sensitive surface-enhanced Raman Spectroscopy (SERS). In this work, large-area glass nanopillar arrays are fabricated on both sides of the wafers by combination of metal dewetting and reactive-ion-etching (RIE) process. Metal layer is deposited onto one side to construct nanoplasmonic biosensing sensor, and remaining one side works as nanostructured antireflective (AR) layer to increase the SERS intensity. The simple, cost-effective fabrication method is very desirable for large-area nanoplasmonic biosensors, and fluidic channel can be integrated for advanced bio-applications with SERS.